Determination of elastic properties of surface layers and coatings

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F14%3A00222569" target="_blank" >RIV/68407700:21230/14:00222569 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1109/ASDAM.2014.6998648" target="_blank" >http://dx.doi.org/10.1109/ASDAM.2014.6998648</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/ASDAM.2014.6998648" target="_blank" >10.1109/ASDAM.2014.6998648</a>

Result language
angličtina
Original language name
Determination of elastic properties of surface layers and coatings
Original language description
This paper shows determination of elastic constants of thin layers deposited on substrates. Resonant ultrasound spectroscopy is used to measure resonant spectras before and after layer deposition. These two spectra are compared and changes in the position of the resonant peaks are associated with layer properties. For thin layers either the elastic moduli or the surface mass density can be determined, providing the complementary information.
Czech name
—
Czech description
—

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
10th International Conference on Advanced Semiconductor Devices and Microsystems ASDAM 2014 Conference Proceedings
ISBN
978-1-4799-5475-9
ISSN
2475-2916
e-ISSN
—
Number of pages
4
Pages from-to
69-72
Publisher name
Slovak University of Technology in Bratislava
Place of publication
Bratislava
Event location
Smolenice
Event date
Oct 20, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000412228100017

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