THE INTRINSIC SUBMICRON ZNO THIN FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F16%3A00327530" target="_blank" >RIV/68407700:21230/16:00327530 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/17:00478348 RIV/68407700:21460/16:00327530
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
THE INTRINSIC SUBMICRON ZNO THIN FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING
Original language description
The DC reactive magnetron sputtering of metallic target in oxide atmosphere is a simple method of depositing the intrinsic (undoped) nanocrystalline layers of metal oxides. We have optimized the deposition of the intrinsic ZnO thin films with submicron thickness 50-500 nm on fused silica glass substrates and investigated the localized defect states below the optical absorption edge down to 0.01 % using photothermal deflection spectroscopy from UV to IR. We have shown that the defect density, the optical absorptance and the related optical attenuation in planar waveguides can be significantly reduced by annealing in air at 400 degrees C.
Czech name
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Czech description
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Project
<a href="/en/project/TH01020276" target="_blank" >TH01020276: Flexible 2D & 3D polymer photonics structures</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
8TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2016)
ISBN
978-80-87294-71-0
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
36-41
Publisher name
Tanger
Place of publication
Ostrava
Event location
Brno
Event date
Oct 28, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000410656100005

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