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THE INTRINSIC SUBMICRON ZNO THIN FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F16%3A00327530" target="_blank" >RIV/68407700:21230/16:00327530 - isvavai.cz</a>

  • Alternative codes found

    RIV/68378271:_____/17:00478348 RIV/68407700:21460/16:00327530

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    THE INTRINSIC SUBMICRON ZNO THIN FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING

  • Original language description

    The DC reactive magnetron sputtering of metallic target in oxide atmosphere is a simple method of depositing the intrinsic (undoped) nanocrystalline layers of metal oxides. We have optimized the deposition of the intrinsic ZnO thin films with submicron thickness 50-500 nm on fused silica glass substrates and investigated the localized defect states below the optical absorption edge down to 0.01 % using photothermal deflection spectroscopy from UV to IR. We have shown that the defect density, the optical absorptance and the related optical attenuation in planar waveguides can be significantly reduced by annealing in air at 400 degrees C.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

  • OECD FORD branch

    20201 - Electrical and electronic engineering

Result continuities

  • Project

    <a href="/en/project/TH01020276" target="_blank" >TH01020276: Flexible 2D & 3D polymer photonics structures</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2016

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    8TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2016)

  • ISBN

    978-80-87294-71-0

  • ISSN

  • e-ISSN

  • Number of pages

    6

  • Pages from-to

    36-41

  • Publisher name

    Tanger

  • Place of publication

    Ostrava

  • Event location

    Brno

  • Event date

    Oct 28, 2016

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article

    000410656100005