Optimization of microroughness of replicated X-ray optics
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F17%3A00311891" target="_blank" >RIV/68407700:21230/17:00311891 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21340/17:00311891
Result on the web
<a href="http://dx.doi.org/10.1117/12.2265810" target="_blank" >http://dx.doi.org/10.1117/12.2265810</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2265810" target="_blank" >10.1117/12.2265810</a>
Alternative languages
Result language
angličtina
Original language name
Optimization of microroughness of replicated X-ray optics
Original language description
We report on our work of minimizing the microroughness of replicated grazing incidence X-ray optics. Ion beam and RF sputter cleaning was used as surface treatment and we compare its effects in the article. Vacuum deposition of smoothing layers was also used for minimizing the microroughness. The surfaces were measured by atomic force microscopy and X-ray reflectometry. Microroughness less than 0,5 nm RMS and Ra was achieved.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
—
OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
—
Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proc. SPIE 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V
ISBN
978-1-5106-0972-3
ISSN
0277-786X
e-ISSN
1996-756X
Number of pages
9
Pages from-to
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Publisher name
The International Society for Optical Engineering (SPIE)
Place of publication
Bellingham WA
Event location
Praha
Event date
Apr 24, 2017
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000406801200006