Analysis of Evaporation Process of Thin Ni Films by Factorial Experiments and Taguchi Approach

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F17%3A00318189" target="_blank" >RIV/68407700:21230/17:00318189 - isvavai.cz</a>
Result on the web
<a href="http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=8259866" target="_blank" >http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=8259866</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/SIITME.2017.8259866" target="_blank" >10.1109/SIITME.2017.8259866</a>

Result language
angličtina
Original language name
Analysis of Evaporation Process of Thin Ni Films by Factorial Experiments and Taguchi Approach
Original language description
Process of evaporation of thin Ni films has been described using Full factorials experiments and Taguchi approach. Ni film have been evaporated from a tungsten evaporator on glass substrates. The thickness of evaporated films has been monitored in dependence on the mass of evaporated material, on the pressure in the vaccuum bell jar and on the temperature of the substrate. It was found that the dominant influence of the evaporated thickness has the evaporated mass and pressure in the recipient, the influence of the substrate temperature is very low.
Czech name
—
Czech description
—

Project
—
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
IEEE 23rd International Symposium for Design and Technology in Electronic Packaging
ISBN
978-1-5386-1626-0
ISSN
2641-287X
e-ISSN
—
Number of pages
4
Pages from-to
98-101
Publisher name
Cavallioti
Place of publication
—
Event location
Constanta
Event date
Oct 26, 2017
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000428032300017

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