Oxidation behaviour of TiSiN(Ag) films deposited by high power impulse magnetron sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F19%3A00335889" target="_blank" >RIV/68407700:21230/19:00335889 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.tsf.2019.137423" target="_blank" >https://doi.org/10.1016/j.tsf.2019.137423</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2019.137423" target="_blank" >10.1016/j.tsf.2019.137423</a>
Alternative languages
Result language
angličtina
Original language name
Oxidation behaviour of TiSiN(Ag) films deposited by high power impulse magnetron sputtering
Original language description
TiSiN coatings alloyed with increasing silver content were deposited for designing a self-lubricant coating with controlled lubricant element diffusion. Here, we report the influence of the Ag content on the oxidation behaviour of TiSiN(Ag) films deposited by HiPIMS (High Power Impulse Magnetron Sputtering) working in DOMS (Deep Oscillation Magnetron Sputtering) mode. In-situ high-temperature oxidation X-ray diffractograms allowed to observe the first signs of oxidation occurring at about similar to 850 degrees C with the appearance of the rutile TiO2 peaks. Observation of even distribution of silver was still possible on the un-oxidized part of the films, suggesting that the films offer an efficient barrier to the Ag diffusion. Dynamic-mode thermogravimetry analysis showed that silver addition does not change the onset point of oxidation of the coatings. However, the oxidation rate deteriorated with the presence of Ag. An unusual mass loss could be observed for the coatings with 6 and 10 at.% of Ag, as a result of silver evaporation/sublimation process. Results from isothermal thermogravimetry performed at 900 degrees C show two distinct regimes and corroborate the detrimental effect of the Ag on the oxidation resistance of the coatings. Nonetheless, in the un-oxidized part of the films, the silver continued to be homogeneously distributed confirming again the efficient barrier against Ag diffusion.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Thin Solid Films
ISSN
0040-6090
e-ISSN
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Volume of the periodical
688
Issue of the periodical within the volume
October
Country of publishing house
CH - SWITZERLAND
Number of pages
9
Pages from-to
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UT code for WoS article
000485256500033
EID of the result in the Scopus database
2-s2.0-85069643551