Chemical vapor deposition of diamond fimls on QCM substrates

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F23%3A00366679" target="_blank" >RIV/68407700:21230/23:00366679 - isvavai.cz</a>
Result on the web
<a href="https://adept.fyzika.uniza.sk/Proceedings_ADept_2023web.pdf" target="_blank" >https://adept.fyzika.uniza.sk/Proceedings_ADept_2023web.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Chemical vapor deposition of diamond fimls on QCM substrates
Original language description
The quartz crystal microbalance (QCM) represents an acoustic (mass) analytical platform suitable for the detection of gases and biomolecules in air and liquid, respectively. Several studies have shown that the sensing performance, sensitivity, and selectivity of QCMs are further enhanced by using an appropriate functional layer. Among others, diamond is one such attractive material thanks to its extraordinary properties. However, the use of standard CVD diamond growth procedures at 800 °C cannot be applied to the QCM substrate due to its low phase transition temperature (570 °C). An alternative solution here offers a low-temperature (400 °C) linear antenna microwave plasma. In this work, we demonstrate technological progress in diamond growth on QCM substrates in terms of maintaining their functionality and the ability to cover both sides in one deposition cycle due to the low pressure (<15 mbar) and placement of the QCM substrate in the so-called cold plasma region.
Czech name
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Czech description
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Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the International Conference on Advances in Electronicc and Photonic Technologies, held in Tatranská Lomnica, High Tatras, Slovakia, June 12 – 15, 2023
ISBN
978-80-554-1977-0
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
157-160
Publisher name
EDIS - Publishing Institution of the University of Zilina
Place of publication
Žilina
Event location
Podbanské, High Tatras
Event date
Jun 12, 2023
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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