Mechanical and Tribological Characterization of CNx Films Deposited by D.C.Magnetron Sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21260%2F07%3A06139515" target="_blank" >RIV/68407700:21260/07:06139515 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Mechanical and Tribological Characterization of CNx Films Deposited by D.C.Magnetron Sputtering
Original language description
Carbon nitride (CNx) thin films were deposited onto silicon and steel substrates at 400 °C from a carbon target by d.c. magnetron sputtering system. The composition, structural, and mechanical properties of deposited films were investigated as a functionof argon/nitrogen concentration and sputtering power
Czech name
Mechanická a tribologická charakterizace vrstev CNx deponovaných d.c. magnetronovým naprašováním
Czech description
Mechanická a tribologická charakterizace vrstev CNx deponovaných d.c. magnetronovým naprašováním
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JI - Composite materials
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GP106%2F07%2FP014" target="_blank" >GP106/07/P014: Self-lubricating coatings based on transition metal dichalcogenides</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Physica Status Solidi (c)
ISSN
1610-1634
e-ISSN
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Volume of the periodical
4
Issue of the periodical within the volume
11
Country of publishing house
DE - GERMANY
Number of pages
8
Pages from-to
4267-4274
UT code for WoS article
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EID of the result in the Scopus database
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