Dynamic behaviour of a planar micro-beam loaded by a fluid-gap: Analytical and numerical approach in a high frequency range, benchmark solutions
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21260%2F17%3A00311569" target="_blank" >RIV/68407700:21260/17:00311569 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.jsv.2017.04.026" target="_blank" >http://dx.doi.org/10.1016/j.jsv.2017.04.026</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.jsv.2017.04.026" target="_blank" >10.1016/j.jsv.2017.04.026</a>
Alternative languages
Result language
angličtina
Original language name
Dynamic behaviour of a planar micro-beam loaded by a fluid-gap: Analytical and numerical approach in a high frequency range, benchmark solutions
Original language description
Miniaturized vibrating MEMS devices, active (receivers or emitters) or passive devices, and their use for either new applications (hearing, meta-materials, consumer devices,...) or metrological purposes under non-standard conditions, are involved today in several acoustic domains. More in-depth characterisation than the classical ones available until now are needed. In this context, the paper presents analytical and numerical approaches for describing the behaviour of three kinds of planar micro-beams of rectangular shape (suspended rigid or clamped elastic planar beam) loaded by a backing cavity or a fluid-gap, surrounded by very thin slits, and excited by an incident acoustic field. The analytical approach accounts for the coupling between the vibrating structure and the acoustic field in the backing cavity, the thermal and viscous diffusion processes in the boundary layers in the slits and the cavity, the modal behaviour for the vibrating structure, and the non-uniformity of the acoustic field in the backing cavity which is modelled in using an integral formulation with a suitable Green's function. Benchmark solutions are proposed in terms of beam motion (from which the sensitivity, input impedance, and pressure transfer function can be calculated). A numerical implementation (FEM) is handled against which the analytical results are tested.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10307 - Acoustics
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Sound and Vibration
ISSN
0022-460X
e-ISSN
1095-8568
Volume of the periodical
401
Issue of the periodical within the volume
August
Country of publishing house
GB - UNITED KINGDOM
Number of pages
18
Pages from-to
36-53
UT code for WoS article
000403514800003
EID of the result in the Scopus database
2-s2.0-85019654785