Analytical modelling of a MEMS transducer composed of a rigid micro-beam attached at one end to a flat spring moving against a reduced-size backplate

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21260%2F19%3A00333363" target="_blank" >RIV/68407700:21260/19:00333363 - isvavai.cz</a>
Result on the web
<a href="http://pub.dega-akustik.de/ICA2019/data/articles/001053.pdf" target="_blank" >http://pub.dega-akustik.de/ICA2019/data/articles/001053.pdf</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.18154/RWTH-CONV-239662" target="_blank" >10.18154/RWTH-CONV-239662</a>

Result language
angličtina
Original language name
Analytical modelling of a MEMS transducer composed of a rigid micro-beam attached at one end to a flat spring moving against a reduced-size backplate
Original language description
The use of planar micro-beams as moving parts of acoustic and electroacoustic devices has increased recently because of their geometrical simplicity, hence lowering fabrication costs. The precise modelling of such devices is then of interest. The miniaturized transducer proposed herein is composed of a planar rigid micro-beam attached at one end to a flat spring (the other end remaining free) surrounded by thin slits and loaded by a thin fluid layer (situated in the gap between the micro-beam and a reduced-size backplate) and a small cavity, both being placed behind the beam. Such a configuration reduces the overall size of the device (no need of an external cavity) and enables to adjust more parameters comparing to the case of the backplate of the same size as the one of the micro-beam. The thermoviscous damping effects originating in the fluid-filled parts of the device (slits, air-gap, and cavity) are taken into account. As a result of the model, the displacement of the micro-beam is calculated and compared with the reference finite element solution, the acoustic pressure sensitivity of the transducer is finally presented and discussed.
Czech name
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Czech description
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Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the 23rd International Congress on Acoustics, integrating 4th EAA Euroregio 2019
ISBN
978-3-939296-15-7
ISSN
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e-ISSN
2226-7808
Number of pages
7
Pages from-to
7410-7416
Publisher name
Deutsche Gesellschaft für Akustik
Place of publication
Dresden
Event location
Aachen
Event date
Sep 9, 2019
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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