Modelling of a MEMS transducer using approximate eigenfunctions of a square clamped plate
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21260%2F19%3A00333530" target="_blank" >RIV/68407700:21260/19:00333530 - isvavai.cz</a>
Result on the web
<a href="http://pub.dega-akustik.de/ICA2019/data/articles/000778.pdf" target="_blank" >http://pub.dega-akustik.de/ICA2019/data/articles/000778.pdf</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.18154/RWTH-CONV-239436" target="_blank" >10.18154/RWTH-CONV-239436</a>
Alternative languages
Result language
angličtina
Original language name
Modelling of a MEMS transducer using approximate eigenfunctions of a square clamped plate
Original language description
The model of electroacoustic MEMS transducer with a moving square shaped clamped plate loaded by a thin fluid gap and a peripheral cavity is presented herein. The behaviour of the transducer, namely the thermal and viscous boundary layers effects originating in the fluid gap between the moving electrode and the fixed one and the strong coupling between the moving electrode displacement and the acoustic pressure field in the fluid gap, have to be described correctly by the model. The modelling approach proposed herein involving the integral method for describing the acoustic pressure in the fluid gap requires an analytical expression of eigenfunctions of the square shaped clamped plate. Such an approximate expression in form of two-dimensional cosine series proposed recently suffers from slow convergence and inaccurate boundary conditions. The solution proposed herein is based on the series expansion over the system of functions satisfying exactly the boundary conditions, which leads to faster convergence, hence lowering computational costs. The proposed eigenfunctions are described and the difference from the previous approximations is discussed. Finally, the acoustic pressure sensitivity of the transducer is presented and compared to the results of a reference finite element model.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 23rd International Congress on Acoustics, integrating 4th EAA Euroregio 2019
ISBN
978-3-939296-15-7
ISSN
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e-ISSN
2226-7808
Number of pages
8
Pages from-to
7361-7368
Publisher name
Deutsche Gesellschaft für Akustik
Place of publication
Dresden
Event location
Aachen
Event date
Sep 9, 2019
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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