Modeling of MEMS Transducers with Perforated Moving Electrodes

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21260%2F23%3A00366096" target="_blank" >RIV/68407700:21260/23:00366096 - isvavai.cz</a>

Result on the web

<a href="https://doi.org/10.3390/mi14050921" target="_blank" >https://doi.org/10.3390/mi14050921</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/mi14050921" target="_blank" >10.3390/mi14050921</a>

Result language

angličtina

Original language name

Modeling of MEMS Transducers with Perforated Moving Electrodes

Original language description

Microfabricated electroacoustic transducers with perforated moving plates used as microphones or acoustic sources have appeared in the literature in recent years. However, optimization of the parameters of such transducers for use in the audio frequency range requires high-precision theoretical modeling. The main objective of the paper is to provide such an analytical model of a miniature transducer with a moving electrode in the form of a perforated plate (rigid elastically supported or elastic clamped at all boundaries) loaded by an air gap surrounded by a small cavity. The formulation for the acoustic pressure field inside the air gap enables expression of the coupling of this field to the displacement field of the moving plate and to the incident acoustic pressure through the holes in the plate. The damping effects of the thermal and viscous boundary layers originating inside the air gap, the cavity, and the holes in the moving plate are also taken into account. The analytical results, namely, the acoustic pressure sensitivity of the transducer used as a microphone, are presented and compared to the numerical (FEM) results.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10307 - Acoustics

Project

—

Continuities

S - Specificky vyzkum na vysokych skolach

Publication year

2023

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Micromachines

ISSN

2072-666X

e-ISSN

2072-666X

Volume of the periodical

14

Issue of the periodical within the volume

921

Country of publishing house

CH - SWITZERLAND

Number of pages

15

Pages from-to

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UT code for WoS article

000997301200001

EID of the result in the Scopus database

2-s2.0-85160614966