Modelling of a MEMS transducer with a square plate loaded by a thin fluid layer

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21260%2F18%3A00322084" target="_blank" >RIV/68407700:21260/18:00322084 - isvavai.cz</a>

Result on the web

<a href="http://www.euronoise2018.eu/docs/papers/58_Euronoise2018.pdf" target="_blank" >http://www.euronoise2018.eu/docs/papers/58_Euronoise2018.pdf</a>

DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Modelling of a MEMS transducer with a square plate loaded by a thin fluid layer

Original language description

Electroacoustic MEMS transducers are involved in a variety of applications such as consumer devices, but their use increases today also in the domain of wireless noise monitoring systems. Since the high quality (and low price in case of high number of sensor nodes) is needed, the precise modelling of such devices leading to the new solutions is of interest. The transducer, whose model is described herein, consists of a square plate as a moving electrode loaded by a thin fluid gap and a rectangular peripheral cavity, the square shape of the transducer being advantageous from the point of view of microfabrication because of its geometrical simplicity. The analytical approach relies on the integral formulation for the acoustic pressure field in the thin fluid gap (the dissipative effects of the thermal and viscous boundary layers being taken into account) coupled with the displacement field of the plate expressed as a sum of eigenmodes. Special attention is paid herein to the expression of the eigenfunctions of the plate, which are searched for in an approximated analytical form of two-dimensional Fourier series, the coefficients of the series being derived from a simple numerical solution for the plate without the loading acoustic elements. The acoustic pressure sensitivity of the transducer, used as an acoustic receiver, is obtained from the analytical model of the transducer, the comparison with the numerical results provided by a finite element model (a reference against which the analytical results are tested) is presented and discussed.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

20201 - Electrical and electronic engineering

Project

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Continuities

S - Specificky vyzkum na vysokych skolach

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Euronoise 2018

ISBN

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ISSN

2226-5147

e-ISSN

2226-5147

Number of pages

4

Pages from-to

337-340

Publisher name

European Acoustics Association

Place of publication

Madrid

Event location

Heraklion, Crete

Event date

May 27, 2018

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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