Characterization of RF-Sputtered Self-Polarized PZT thin Films for IR Sensor Arrays

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F02%3A04083798" target="_blank" >RIV/68407700:21340/02:04083798 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Characterization of RF-Sputtered Self-Polarized PZT thin Films for IR Sensor Arrays
Original language description
In this work, a complex investigation of film composition, microstructure and physical properties of RF-sputtered self-polarized PZT thin films for IR sensor arrays was carried out. Hydrostatic stresses in Si substrates near edges of Pt/PZT microstructures were predicted theoretically by finite element calculations and measured by spatially resolved Raman spectroscopy. High hydrostatic stresses were obtained in patterned sensor pixels by Raman piezo-spectroscopy. The laser-intensity-modulation method was applied for the investigation of the self-polarization profile, whereas the depth profile of the refractive index was determined by means of spectroscopic ellipsometry. Polarization and refractive index profiles as well as interface stresses affect IR-radiation sensor performance. Thickness and area dependences of IR-radiation detector detectivity and noise equivalent temperature difference were calculated.
Czech name
—
Czech description
—

Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
—

Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)