Characterization of Capillary Discharge Water-Window Radiation Source

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F12%3A00201790" target="_blank" >RIV/68407700:21340/12:00201790 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21460/12:00201790
Result on the web
<a href="http://www.euvlitho.com" target="_blank" >http://www.euvlitho.com</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Characterization of Capillary Discharge Water-Window Radiation Source
Original language description
Intense XUV radiation in the "water-window" wavelength region, i.e. 2.3 - 4.4 nm, was generated by a Z-pinching capillary discharge in Nitrogen and Argon. The current driver is capable to deliver 23 kA in a pulse with rise-time of 50 ns into a 100 mm long, 3.2 mm diameter capillary. The output XUV radiation was characterized by following diagnostic methods: The time evolution of radiation emission from the capillary discharge Z-pinching Nitrogen and Argon plasma was measured by a XUV PIN diode in orderto get radiation intensity and energy per pulse. Beam profile and divergence were measured via time-integrated image captured by a soft X-RAY BI-CCD camera. The radiation source size was found via a pinhole image. Spectral characteristics were obtained using a SiNx transmission grating. A 0.5 ?m Titanium filter was used to select the wavelength region from 2.73 nm to approx. 6 nm. Optimization of initial gas pressure and discharge current amplitude was performed in order to find the maxi
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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