Fabrication of diffractive elements using matrix laser lithography

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F13%3A00215709" target="_blank" >RIV/68407700:21340/13:00215709 - isvavai.cz</a>

Result on the web

<a href="http://www.epj-conferences.org/articles/epjconf/pdf/2013/09/epjconf_OAM2012_00023.pdf" target="_blank" >http://www.epj-conferences.org/articles/epjconf/pdf/2013/09/epjconf_OAM2012_00023.pdf</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1051/epjconf/20134800023" target="_blank" >10.1051/epjconf/20134800023</a>

Result language

angličtina

Original language name

Fabrication of diffractive elements using matrix laser lithography

Original language description

In this paper, a laser writing technique for fabrication of diffractive and photonic structures is presented, which is based on a computer driven matrix exposure of a recording material. In contrast to the commonly used laser writing techniques, a relatively large area is exposed within a single exposure step, which ensures a high speed of the writing process. The exposed micro-structure is projected from a computer driven spatial light modulator with high resolution on a recording material with strongdemagnification. The mechanically passive projection ensures high precision of the writing process, which is limited only by the Rayleigh diffraction limit. When multiple exposures of the same area are used, complicated micro-structures can be prepared.The device constructed on the described basis will be presented together with different samples prepared using this technology. Selected applications of the elements will be also mentioned.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

<a href="/en/project/KAN401220801" target="_blank" >KAN401220801: Nanostructures of Controlled Size and Dimensions</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

EPJ Web of Conferences

ISSN

2100-014X

e-ISSN

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Volume of the periodical

48

Issue of the periodical within the volume

48

Country of publishing house

FR - FRANCE

Number of pages

5

Pages from-to

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UT code for WoS article

000326985500022

EID of the result in the Scopus database

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