Advanced matrix laser lithography for fabrication of photonic micro-structures

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F12%3A00203837" target="_blank" >RIV/68407700:21340/12:00203837 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.2971/jeos.2012.12043" target="_blank" >http://dx.doi.org/10.2971/jeos.2012.12043</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.2971/jeos.2012.12043" target="_blank" >10.2971/jeos.2012.12043</a>

Result language

angličtina

Original language name

Advanced matrix laser lithography for fabrication of photonic micro-structures

Original language description

Direct laser beam writing techniques represent an interesting alternative to focused electron and ion beam writing approaches for the fabrication of photonic micro-structures. Although the resolution of laser beam writers is strongly limited by the Rayleigh diffraction limit, it is not always necessary to create features significantly smaller than the recording wavelength. In such cases, a laser exposure can be used, with all its advantages. In this paper a direct laser writing technique is presented one; which significantly improves the performance of commonly used direct laser writers by introducing an exposure of a large area within a single step. The elementary exposed area can contain a general micro-structure without any special requirements. Incontrast to writing techniques based on a single spot focus, the writing beam can have the shape of a general aperiodic structure and exposes an area of about 10-2 square millimetre. This complicated exposure field is created using a dema

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

<a href="/en/project/KAN401220801" target="_blank" >KAN401220801: Nanostructures of Controlled Size and Dimensions</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2012

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of the European Optical Society Rapid Publication

ISSN

1990-2573

e-ISSN

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Volume of the periodical

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Issue of the periodical within the volume

7

Country of publishing house

DE - GERMANY

Number of pages

8

Pages from-to

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UT code for WoS article

000310570500001

EID of the result in the Scopus database

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