EUV ablation: A study of the process

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F15%3A00241834" target="_blank" >RIV/68407700:21340/15:00241834 - isvavai.cz</a>
Result on the web
<a href="http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2293876" target="_blank" >http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2293876</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2178868" target="_blank" >10.1117/12.2178868</a>

Result language
angličtina
Original language name
EUV ablation: A study of the process
Original language description
An investigation on short-wavelength ablation mechanism of poly(1,4-phenylene ether ether-sulfune) PPEESand poly (1-hexadecene-sulfone) PHDS (Figure 9-10) by EUV radiation is presented. The goal of this work is to evaluate the ablation behavior with respect to the influence of wavelength, fluence and quantum efficiency. Because there is no yet a general EUV ablation theory, data are analyzed in order to underline regularity of the process which can be used in future to detect the scaling laws of the process. The differences with longer wavelengths ablation and EUV one are pointed out and possible applications of EUV ablation are proposed.
Czech name
—
Czech description
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Project
<a href="/en/project/LD14032" target="_blank" >LD14032: Advanced methods for X-metrology and imaging</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
EUV and X-Ray Optics: Synergy Between Laboratory and Space IV
ISBN
978-1-62841-631-2
ISSN
0277-786X
e-ISSN
—
Number of pages
11
Pages from-to
"951011-1"-"951011-11"
Publisher name
SPIE
Place of publication
Bellingham (stát Washington)
Event location
Praha
Event date
Apr 13, 2015
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
000356859800031

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