EUV source at Hilase: The state of the art
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F19%3A00339583" target="_blank" >RIV/68407700:21340/19:00339583 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.17973/MMSJ.2019_12_2018131" target="_blank" >https://doi.org/10.17973/MMSJ.2019_12_2018131</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.17973/MMSJ.2019_12_2018131" target="_blank" >10.17973/MMSJ.2019_12_2018131</a>
Alternative languages
Result language
angličtina
Original language name
EUV source at Hilase: The state of the art
Original language description
An overview of the Extreme Ultraviolet (EUV) source to be constructed in the frame of the Czech national R&D project HiLASE (High average power pulsed LASErs) is presented. The HiLASE EUV source will be devoted to industrial and medical applications, as well as to fundamental studies (such as the chemistry of polymers). This wide variety of different applications depends on the possibility of targeting different EUV wavelengths (namely 13.5 nm and the water window range, 2.33-4.40 nm), which is insured by the fact that the projected table top EUV source can work on multiple different HiLASE lasers: The cryogenically cooled, Yb:YAG slab high energy laser system and the thin-disk, high repetition rate picosecond laser systems. HiLASE EUV source is intended as a user oriented device based on a laser plasma source with single stream gas-puff target.
Czech name
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Czech description
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Classification
Type
J<sub>SC</sub> - Article in a specialist periodical, which is included in the SCOPUS database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
<a href="/en/project/LTT17015" target="_blank" >LTT17015: Reserch in frame International Center for Dense Magnetized Plasmas</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
MM Science Journal
ISSN
1803-1269
e-ISSN
1805-0476
Volume of the periodical
2019
Issue of the periodical within the volume
December
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
4
Pages from-to
3406-3409
UT code for WoS article
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EID of the result in the Scopus database
2-s2.0-85076619255