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EUV source at Hilase: The state of the art

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F19%3A00339583" target="_blank" >RIV/68407700:21340/19:00339583 - isvavai.cz</a>

  • Result on the web

    <a href="https://doi.org/10.17973/MMSJ.2019_12_2018131" target="_blank" >https://doi.org/10.17973/MMSJ.2019_12_2018131</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.17973/MMSJ.2019_12_2018131" target="_blank" >10.17973/MMSJ.2019_12_2018131</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    EUV source at Hilase: The state of the art

  • Original language description

    An overview of the Extreme Ultraviolet (EUV) source to be constructed in the frame of the Czech national R&D project HiLASE (High average power pulsed LASErs) is presented. The HiLASE EUV source will be devoted to industrial and medical applications, as well as to fundamental studies (such as the chemistry of polymers). This wide variety of different applications depends on the possibility of targeting different EUV wavelengths (namely 13.5 nm and the water window range, 2.33-4.40 nm), which is insured by the fact that the projected table top EUV source can work on multiple different HiLASE lasers: The cryogenically cooled, Yb:YAG slab high energy laser system and the thin-disk, high repetition rate picosecond laser systems. HiLASE EUV source is intended as a user oriented device based on a laser plasma source with single stream gas-puff target.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>SC</sub> - Article in a specialist periodical, which is included in the SCOPUS database

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    <a href="/en/project/LTT17015" target="_blank" >LTT17015: Reserch in frame International Center for Dense Magnetized Plasmas</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2019

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    MM Science Journal

  • ISSN

    1803-1269

  • e-ISSN

    1805-0476

  • Volume of the periodical

    2019

  • Issue of the periodical within the volume

    December

  • Country of publishing house

    CZ - CZECH REPUBLIC

  • Number of pages

    4

  • Pages from-to

    3406-3409

  • UT code for WoS article

  • EID of the result in the Scopus database

    2-s2.0-85076619255