Processing and characterization of edgeless radiation detectors for large area detection
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21670%2F13%3A00215991" target="_blank" >RIV/68407700:21670/13:00215991 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.nima.2013.06.097" target="_blank" >http://dx.doi.org/10.1016/j.nima.2013.06.097</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.nima.2013.06.097" target="_blank" >10.1016/j.nima.2013.06.097</a>
Alternative languages
Result language
angličtina
Original language name
Processing and characterization of edgeless radiation detectors for large area detection
Original language description
The edgeless or active edge silicon pixel detectors have been gaining a lot of interest due to improved silicon processing capabilities. At VTT, we have recently triggered a multi-project wafer process of edgeless silicon detectors. Totally 80 pieces of150 mm wafers were processed to provide a given number of detector variations. Fabricated detector thicknesses were 100, 200, 300 and 500 ?m. The polarities of the fabricated detectors on the given thicknesses were n-in-n, p-in-n, n-in-p and p-in-p. On the n-in-n and n-in-p wafers the pixel isolation was made either with a common p-stop grid or with a shallow p-spray doping. The wafer materials were high resistivity Float Zone and Magnetic Czochralski silicon with crystal orientation of <100>. In this paper, the electric properties on various types of detectors are presented. The results from spectroscopic measurement show a good energy resolution of the edge pixels, indicating an excellent charge collection near the edge pixels of the
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BG - Nuclear, atomic and molecular physics, accelerators
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Nuclear Instruments and Methods in Physics Research, Section A, Accelerators, Spectrometers, Detectors and Associated Equipment
ISSN
0168-9002
e-ISSN
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Volume of the periodical
731
Issue of the periodical within the volume
731
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
5
Pages from-to
205-209
UT code for WoS article
000327487500040
EID of the result in the Scopus database
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