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Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds
The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia and their binary mixtures was investigated on pure tin and tungsten oxide <...
JB - Senzory, čidla, měření a regulace
- 2003 •
- D
Rok uplatnění
D - Stať ve sborníku
Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures
Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to g...
JA - Elektronika a optoelektronika, elektrotechnika
- 2003 •
- D
Rok uplatnění
D - Stať ve sborníku
Tunable THz metamaterials based on an array of paraelectricSrTiO3 rods
This work presents theoretical and experimental investigations of a tunable metamaterial which exhibits negative permeability in the THz frequency range. The tunability is obtained by temperature changes, and the sample consists of an array ...
BM - Fyzika pevných látek a magnetismus
- 2011 •
- Jx •
- Link
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Výsledek na webu
Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures
Either by screen-printing or sputtering, sensitive layers of tin oxide were deposited on silicon micromachined substrates (four-element integrated microarrays an integrated array of four integrated microsensors operated at two diffe...
JB - Senzory, čidla, měření a regulace
- 2004 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Influence of Geometrical Arrangements of Si Tip Arrays Fabricated by Laser Micromachining on their Emission Behaviour
Densely packed emitters on a field emission array lead typically to mutual shielding. Taking biology as a role model for geometric arrangements could be a way and investigated. Emission currents of 6 μA in the spiral ordered array a...
Condensed matter physics (including formerly solid state physics, supercond.)
- 2021 •
- D •
- Link
Rok uplatnění
D - Stať ve sborníku
Výsledek na webu
Device for electrochemical micromachining of the vacuum orifices
Device for electrochemical micromachining of the vacuum orifices for the pressure standards of medium and high vacuum...
JB - Senzory, čidla, měření a regulace
- 2012 •
- Gfunk
Rok uplatnění
Gfunk - Funkční vzorek
Machines for micromachining
The paper describes the very precise machines for the micromachining. The research themes are described on the practical examples. The new trends in microtechnologie are shown....
JQ - Strojní zařízení a nástroje
- 2003 •
- D
Rok uplatnění
D - Stať ve sborníku
Laser micromachining of glass, silicon and ceramics. A review
A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, automotive, communication and aerospace....
BH - Optika, masery a lasery
- 2015 •
- Jx •
- Link
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Výsledek na webu
Laser micromachining of glass, silicon, and ceramics
A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication...
JP - Průmyslové procesy a zpracování
- 2015 •
- Jx •
- Link
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Výsledek na webu
Laser Micromachining of Glass, Silicon, and Ceramics
A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication...
JP - Průmyslové procesy a zpracování
- 2015 •
- Jx •
- Link
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Výsledek na webu
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