Laser micromachining of glass, silicon and ceramics. A review
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F15%3A33154955" target="_blank" >RIV/61989592:15310/15:33154955 - isvavai.cz</a>
Result on the web
<a href="http://www.eijst.org.uk/images/frontImages/gallery/Vol._4_No._7/6._41-49.pdf" target="_blank" >http://www.eijst.org.uk/images/frontImages/gallery/Vol._4_No._7/6._41-49.pdf</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Laser micromachining of glass, silicon and ceramics. A review
Original language description
A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, automotive, communication and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
European International Journal of Science and Technology
ISSN
2304-9693
e-ISSN
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Volume of the periodical
4
Issue of the periodical within the volume
7
Country of publishing house
GB - UNITED KINGDOM
Number of pages
9
Pages from-to
41-49
UT code for WoS article
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EID of the result in the Scopus database
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