Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements
Public support
Provider
Ministry of Education, Youth and Sports
Programme
—
Call for proposals
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Main participants
CRYTUR, spol. s r.o.
Contest type
M2 - International cooperation
Contract ID
MSMT-17739/2021-3/3
Alternative language
Project name in Czech
Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements
Annotation in Czech
The overall objective of ID2PPAC is to demonstrate for the 2 nm node that the Performance Power Area and Cost (PPAC) requirements for this generation of leading edge logic technology can be achieved, by developing, consolidating and integrating selected technology solutions for "Lithography Equipment", "Metrology Equipment", "Mask Equipment" and "Process Development & Modules Integration" (i.e. Patterning, CMOS Devices, BEOL interconnect, DTCO/STCO). Crytur's tasks: 1) Wrap-up report on manufacturing process of single-crystal scintillator screens for EUV applications; 2) Ultrafast scintillators with size and quality needed for AMIL's SEM application including detector and mechanics (report); 3) Final report on development of ultrafast scintillator for SEM applications.
Scientific branches
R&D category
AP - Applied research
OECD FORD - main branch
20501 - Materials engineering
OECD FORD - secondary branch
—
OECD FORD - another secondary branch
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CEP - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)
JG - Metallurgy, metal materials<br>JP - Industrial processes and processing
Completed project evaluation
Provider evaluation
V - Vynikající výsledky projektu (s mezinárodním významem atd.)
Project results evaluation
During the project, two functional samples have been created and tested: "Scintillation screen with coating for out-of-band characterization of EUV source" and "Ultrafast scintillators with size and quality needed for AMIL's SEM application". Both functional samples have been forwarded to other industrial partners.
Solution timeline
Realization period - beginning
Jun 1, 2021
Realization period - end
Dec 31, 2024
Project status
U - Finished project
Latest support payment
Feb 10, 2024
Data delivery to CEP
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data delivery code
CEP25-MSM-8A-U
Data delivery date
Jun 27, 2025
Finance
Total approved costs
24,470 thou. CZK
Public financial support
6,118 thou. CZK
Other public sources
0 thou. CZK
Non public and foreign sources
18,352 thou. CZK