Traceable three-dimensional nanometrology

Provider

Ministry of Education, Youth and Sports

Programme

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Call for proposals

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Main participants

Český metrologický institut

Contest type

M2 - International cooperation

Contract ID

MSMT-21096/2016-7

Project name in Czech

Traceable three-dimensional nanometrology

Annotation in Czech

The scientific and technical objectives of this project are to: 1. Reduce the 3D nanomeasurement uncertainty, by means of a bottom up approach, to less than 1 nm for nanodimensional measurands (including line width, height, pitch, and edge/width roughness) on engineered nanostructures and nanoparticles. In addition, to reduce the noise level of metrological AFMs (MAFMs) to 0.1 nm (rms) using a top-down approach, to raise the scanning speed up to 1 mm/s, and to extend the scanning range up to 25 mm/s by further developing the state-of-the-art optical and x-ray interferometry (XRI). 2. Develop reference materials for 3D nanometrology tools including AFM and Scanning Electron Microscopy (SEM). In particular, to realise test structures for characterising the tip geometry in AFMs and the beam size in SEMs and reference standards for width and sidewall roughness measurements. 3. Widen the understanding of probe-sample interactions in AFM and SEM measurements for reducing the measurement uncertainty. In particular, to study the tip-sample interaction force of AFM line width and nanoparticle measurements; to model the image formation of SEM; and to investigate the influence of humidity on AFM measurements. 4. Develop a hybrid metrology for merging measurement results from either different tools (e.g. AFM, SEM, Transmission Electron Microscopy (TEM), Mueller polarimetry and optical scatterometry) or different channels of a single tool. 5. Facilitate the take up of the technology and measurement infrastructure developed by the project by the measurement supply chain (accredited laboratories, instrument manufacturers) and end users (semiconductor industry, precision engineering, optical industry and nanoparticle researchers).

R&D category

ZV - Basic research

CEP classification - main branch

FQ - Public health system, social medicine

CEP - secondary branch

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CEP - another secondary branch

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OECD FORD - equivalent branches <br>(according to the <a href="http://www.vyzkum.cz/storage/att/E6EF7938F0E854BAE520AC119FB22E8D/Prevodnik_oboru_Frascati.pdf">converter</a>)

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Provider evaluation

U - Uspěl podle zadání (s publikovanými či patentovanými výsledky atd.)

Project results evaluation

Following the condition that the candidate of financial contribution was evaluated and afterwards selected by international provider in accordance with the rules of the program the Ministry of Education, Youth ans Sports does not realize the evaluation of project results. The project is evaluated only after its approval by an international provider.

Realization period - beginning

Oct 1, 2016

Realization period - end

Sep 30, 2019

Project status

U - Finished project

Latest support payment

Feb 12, 2019

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data delivery code

CEP20-MSM-8B-U/01:1

Data delivery date

Jun 18, 2020

Total approved costs

4,834 thou. CZK

Public financial support

2,532 thou. CZK

Other public sources

0 thou. CZK

Non public and foreign sources

2,302 thou. CZK