Minimal Fab Design of the Atomic Layer Deposition System
Project goals
The objective of proposed project is development of the ALD system that will suit the concept of Minimal Fab (according to the Minimal Fab Promotion Organization-MFPO). Project activities will be focused on design, fluid-dynamic modelling and construction of PEALD prototype for the deposition on ½ "substrates, which would be compatible with the concept. The proposed system will be able to use different sources of low-temperature plasma, depending on the requirements for the specific ALD process. Process chamber will be equipped with height adjustable sample holder heatable up to 550 °C. The final gas panel will use developed miniature components of the main Japanese partner (company Horiba) because of the very limited space for installation in devices with the concept of Minimal Fab.
Keywords
Public support
Provider
Technology Agency of the Czech Republic
Programme
—
Call for proposals
1.VS DELTA 2 (STA02019TM010)
Main participants
SVCS Process Innovation s.r.o.
Contest type
VS - Public tender
Contract ID
TM01000039 - Smlouva o poskytnutí podpory
Alternative language
Project name in Czech
Minimal Fab design systému depozice po atomárních vrstvách
Annotation in Czech
Cílem navrhovaného projektu je vyvinout ALD depoziční systém, který bude vyhovovat konceptu Minimal Fab (podle standardu Minimal Fab Promotion Organization - MFPO). Pracovní aktivity řešeného projektu se zaměří na design, fluidně dynamické modelování a konstrukce prototypu PEALD systému pro depozice na ½“ substráty, který bude kompatibilní s konceptem Minimal Fab. Navržený systém bude moci využívat různých zdrojů nízkoteplotního plazmatu podle požadavků na konkrétní ALD proces. Depoziční komora bude vybavena výškově stavitelným držákem vzorků vyhřívatelným na teplotu až 550 °C. Finální plynový panel bude využívat nově vyvinuté miniaturní komponenty hlavního japonského partnera, společnosti Horiba, a to z důvodu omezeného prostoru pro instalaci v zařízeních konceptu Minimal Fab.
Scientific branches
R&D category
AP - Applied research
OECD FORD - main branch
10305 - Fluids and plasma physics (including surface physics)
OECD FORD - secondary branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
OECD FORD - another secondary branch
10306 - Optics (including laser optics and quantum optics)
BH - Optics, masers and lasers
BK - Liquid mechanics
BL - Plasma physics and discharge through gases
BM - Solid-state physics and magnetism
Completed project evaluation
Provider evaluation
U - Uspěl podle zadání (s publikovanými či patentovanými výsledky atd.)
Project results evaluation
According to the documented documentation, professional and research reports, the set goals of the project were fulfilled and successfully fulfilled. Individual activities were reflected in outputs in the form of functional samples and prototypes. The planned deadlines for achieving results were met. The development of deposition apparatus that meets the Minimal Fab concept is a unique achievement of Czech application development. The main researcher managed to join the Japanese members of this concept. The project focused on ALD technology, which is not yet included in this concept. The development of these devices for the production of microprocessors and other products on 1/2" size substrates is an interesting solution for testing new production procedures and for research institutions it offers an interesting commercially available solution for research and development in the given area.
Solution timeline
Realization period - beginning
Jan 1, 2020
Realization period - end
Dec 31, 2022
Project status
U - Finished project
Latest support payment
Feb 28, 2022
Data delivery to CEP
Confidentiality
C - Předmět řešení projektu podléhá obchodnímu tajemství (§ 504 Občanského zákoníku), ale název projektu, cíle projektu a u ukončeného nebo zastaveného projektu zhodnocení výsledku řešení projektu (údaje P03, P04, P15, P19, P29, PN8) dodané do CEP, jsou upraveny tak, aby byly zveřejnitelné.
Data delivery code
CEP23-TA0-TM-U
Data delivery date
Dec 21, 2023
Finance
Total approved costs
45,180 thou. CZK
Public financial support
22,529 thou. CZK
Other public sources
0 thou. CZK
Non public and foreign sources
7,968 thou. CZK
Basic information
Recognised costs
45 180 CZK thou.
Public support
22 529 CZK thou.
49%
Provider
Technology Agency of the Czech Republic
OECD FORD
Fluids and plasma physics (including surface physics)
Solution period
01. 01. 2020 - 31. 12. 2022