Filtry
Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system
Low-pressure plasma jet system with two hollow cathodes was used for deposition of BaxSr1-xTiO3 (BSTO) ferroelectric thin films. In the experiment, the composition of BSTO films was controlled by magnitude of average RF power applie...
Condensed matter physics (including formerly solid state physics, supercond.)
- 2008 •
- Jimp
Rok uplatnění
Jimp - Článek v periodiku v databázi Web of Science
Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system
Low-pressure plasma jet system with two hollow cathodes was used for deposition of BaxSr1-xTiO3 (BSTO) ferroelectric thin films. High density pulse modulated RF hollow. In the experiment, the composition of BSTO films was controlled...
Fluids and plasma physics (including surface physics)
- 2007 •
- D
Rok uplatnění
D - Stať ve sborníku
Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system
Pulse modulated double hollow cathode plasma jet system was used for deposition of BaxSr1-xTiO3 (BSTO) thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates and Sr lines and ratio of Ba and Sr atoms in BSTO thin film was ob...
Optics (including laser optics and quantum optics)
- 2006 •
- Jimp
Rok uplatnění
Jimp - Článek v periodiku v databázi Web of Science
RF Hollow Cathode Plasma Jet Deposition of BaxSr1-xTiO3 Films
as other deposition parameters. The as-deposited films exhibit clear BSTO peaks...
BL - Fyzika plasmatu a výboje v plynech
- 2005 •
- D
Rok uplatnění
D - Stať ve sborníku
Low pressure plasma-jet systems and their application for deposition of ceramic thin films
We applied the single and the double hollow cathode plasma jet systems for deposition of BaxSr1-xTiO3 (BSTO) thin films on Si and on multi-layer Si/SiO2/TiO2/Pt of Ba and Sr lines and ratio of Ba and Sr atoms in BSTO thin film was o...
Optics (including laser optics and quantum optics)
- 2007 •
- Jimp
Rok uplatnění
Jimp - Článek v periodiku v databázi Web of Science
Bax Sr1-xTiO3 Thin Films Deposited by RF Hollow Cathode Plasma Jet Technique
The RF modulated plasma jet system was used for the deposition of Bax Sr1-xTiO3 (BST), and SrTiO3 (STO) thin films on Si and multi-layer system Si/SiO2/TiO2/Pt substrates. BSTO and STO thin films were analyzed by X-ray diffraction. During de...
BL - Fyzika plasmatu a výboje v plynech
- 2005 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Deposition of Nanocrystalline and Microcrystalline BaxSr1-xTiO3 by Means of Pulse Modulated Low Pressure Plasma Jet
RF plasma jet system was used for deposition of Bax Sr1-x TiO3 (BSTO) and SrTiO3 (STO) thin films. Optical emission spectroscopy was used for control of concentration of particles sputtered from the hollow cathode. Relation between ratio pre...
BM - Fyzika pevných látek a magnetismus
- 2006 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Space resolved optical emission spectroscopy during deposition of BaxSr1-xTiO3 thin films by double hollow cathode plasma Jet system
Pulse modulated double hollow cathode RF plasma jet system with two separate independent nozzles made of BaTiO3 (BTO) and SrTiO3 (STO) was used for deposition of BSTO thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates. Space reso...
Condensed matter physics (including formerly solid state physics, supercond.)
- 2009 •
- D
Rok uplatnění
D - Stať ve sborníku
System for deposition of perovskite layers
The system for deposition of dielectric BaxSr1-xTiO3 (BSTO - ferroelectric perovskite) layers, exhibiting a profound permittivity dependency on the dc voltage, employs radio-frequency (RF) plasma-chemical reactor with a jet stream plasmatic ...
BH - Optika, masery a lasery
- 2007 •
- X
Rok uplatnění
X - Nezařazeno
System for deposition of perovskite layers
The system for deposition of dielectric BaxSr1-xTiO3 (BSTO ? ferroelectric perovskite) layers, exhibiting a profound permittivity dependency on the dc voltage, employs radio-frequency (RF) plasma-chemical reactor with a jet stream plasmatic ...
Optics (including laser optics and quantum optics)
- 2007 •
- Sdb
Rok uplatnění
Sdb - Specializovaná veřejná databáze
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