Theoretical analysis of the atomic force microscopy characterization of columnar thin ?lms

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F03%3A%230000326" target="_blank" >RIV/00177016:_____/03:#0000326 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Theoretical analysis of the atomic force microscopy characterization of columnar thin ?lms

Original language description

In this paper, the theoretical analysis of the in?uence of ?nite linear dimensions of an atomic force microscope tip on pro?les of the upper boundaries of columnar thin ?lms and their statistical quantities is performed. This analysis is based on a numerical evaluation of the main statistical quantities, i.e. the standard deviations of the heights and slopes, one-dimensional distributions of the probability density of heights and slopes and power spectral density function, corresponding to a simulated columnar structure of the thin ?lms. It is shown that the strongest misrepresentation of the measured pro?les of the upper boundaries of the columnar ?lms originates in the cases when the linear dimensions of the columns are smaller or comparable with thelinear dimensions of the tip. Further, it is shown that using a surface reconstruction procedure one can correct (improve) the boundary pro?les and their statistical quantities partially.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Ultramicroscopy

ISSN

0304-3991

e-ISSN

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Volume of the periodical

94

Issue of the periodical within the volume

11

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

10

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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