Characterization of polymer thin ?lms deposited on aluminum ?lms by the combined optical method and atomic force microscopy

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F06%3A%230000307" target="_blank" >RIV/00177016:_____/06:#0000307 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Characterization of polymer thin ?lms deposited on aluminum ?lms by the combined optical method and atomic force microscopy

Original language description

In this paper, the results of the optical characterization of polymer thin ?lms, deposited by the plasma enhanced chemical vapor deposition on the aluminum ?lms performed by the multisample modi?cation of the optical method based on combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic re?ectometry, are presented. Within this characterization, the existence of roughness of the boundaries of the polymer ?lms is taken into account by means of the Rayleigh?Rice theory. Theoptical constants of these ?lms are described by the dispersion model based on parameterization of the density of electronic states. It is shown that the optical constants of the polymer ?lms depend on their thicknesses, i.e. on the deposition times. Morphology of the upper boundaries of the polymer ?lms is also studied using atomic force microscopy.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/FT-TA%2F094" target="_blank" >FT-TA/094: *Development of the methods for characterization of solid state surfaces.</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2006

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Interface Analysis

ISSN

1096-9918

e-ISSN

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Volume of the periodical

38

Issue of the periodical within the volume

11

Country of publishing house

GB - UNITED KINGDOM

Number of pages

4

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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