Characterization of polymer thin films deposited on aluminum films by the combined optical method and atomic force microscopy

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F06%3A00016537" target="_blank" >RIV/00216224:14310/06:00016537 - isvavai.cz</a>

Alternative codes found

RIV/48399108:_____/06:#0000004

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Characterization of polymer thin films deposited on aluminum films by the combined optical method and atomic force microscopy

Original language description

In this paper, the results of the optical characterization of polymer thin films, deposited by the plasma enhanced chemical vapor deposition on the aluminum films performed by the multisample modification of the optical method based on combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry, are presented. Within this characterization, the existence of roughness of the boundaries of the polymer films is taken into account by means of the Rayleigh-Rice theory.The optical constants of these films are described by the dispersion model based on parameterization of the density of electronic states. It is shown that the optical constants of the polymer films depend on their thicknesses, i.e. on the deposition times. Morphology of the upper boundaries of the polymer films is also studied using atomic force microscopy.

Czech name

Charakterizace polymerních tenkých vrstev deponovaných na hliníkových vrstvách pomocí kombinované optické metody a mikroskopie atomové síly

Czech description

V tomto článku

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/FT-TA%2F094" target="_blank" >FT-TA/094: *Development of the methods for characterization of solid state surfaces.</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2006

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Interface Analysis

ISSN

0142-2421

e-ISSN

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Volume of the periodical

38

Issue of the periodical within the volume

4

Country of publishing house

US - UNITED STATES

Number of pages

5

Pages from-to

842-846

UT code for WoS article

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EID of the result in the Scopus database

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