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Optical characterization of inhomogeneous thin films with randomly rough boundaries

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F22%3AN0000087" target="_blank" >RIV/00177016:_____/22:N0000087 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216224:14310/22:00119633 RIV/00216305:26620/22:PU145144

  • Result on the web

    <a href="https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886" target="_blank" >https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1364/OE.447146" target="_blank" >10.1364/OE.447146</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Optical characterization of inhomogeneous thin films with randomly rough boundaries

  • Original language description

    An inhomogeneous polymer-like thin film was deposited by the plasma enhanced chemical vapor deposition onto silicon single-crystal substrate whose surface was roughened by anodic oxidation. The inhomogeneous thin film with randomly rough boundaries was created as a result. This sample was studied using the variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The structural model including the inhomogeneous thin film, transition layer, and identically rough boundaries was used to process the experimental data. The scalar diffraction theory was used to describe the influence of roughness. The influence of the scattered light registered by the spectrophotometer due to its finite acceptance angle was also taken into account. The thicknesses and optical constants of the inhomogeneous thin film and the transition layer were determined in the optical characterization together with the roughness parameters. The determined rms value of the heights of roughness was found to be in good agreement with values obtained using AFM. The results of the optical characterization of the studied inhomogeneous thin film with rough boundaries were also verified by comparing them with the results of the optical characterization of the inhomogeneous thin film prepared using the same deposition conditions but onto the substrate with a smooth surface.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    20506 - Coating and films

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2022

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Optics Express

  • ISSN

    1094-4087

  • e-ISSN

    1094-4087

  • Volume of the periodical

    30

  • Issue of the periodical within the volume

    2

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    15

  • Pages from-to

    2033-2047

  • UT code for WoS article

    000745037500108

  • EID of the result in the Scopus database

    2-s2.0-85122698130