Optical characterization of inhomogeneous thin films with randomly rough boundaries
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F22%3A00119633" target="_blank" >RIV/00216224:14310/22:00119633 - isvavai.cz</a>
Alternative codes found
RIV/00177016:_____/22:N0000087 RIV/00216305:26620/22:PU145144
Result on the web
<a href="https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886" target="_blank" >https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1364/OE.447146" target="_blank" >10.1364/OE.447146</a>
Alternative languages
Result language
angličtina
Original language name
Optical characterization of inhomogeneous thin films with randomly rough boundaries
Original language description
An inhomogeneous polymer-like thin film was deposited by the plasma enhanced chemical vapor deposition onto silicon single-crystal substrate whose surface was roughened by anodic oxidation. The inhomogeneous thin film with randomly rough boundaries was created as a result. This sample was studied using the variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The structural model including the inhomogeneous thin film, transition layer, and identically rough boundaries was used to process the experimental data. The scalar diffraction theory was used to describe the influence of roughness. The influence of the scattered light registered by the spectrophotometer due to its finite acceptance angle was also taken into account. The thicknesses and optical constants of the inhomogeneous thin film and the transition layer were determined in the optical characterization together with the roughness parameters. The determined rms value of the heights of roughness was found to be in good agreement with values obtained using AFM. The results of the optical characterization of the studied inhomogeneous thin film with rough boundaries were also verified by comparing them with the results of the optical characterization of the inhomogeneous thin film prepared using the same deposition conditions but onto the substrate with a smooth surface.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Optics Express
ISSN
1094-4087
e-ISSN
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Volume of the periodical
30
Issue of the periodical within the volume
2
Country of publishing house
US - UNITED STATES
Number of pages
15
Pages from-to
2033-2047
UT code for WoS article
000745037500108
EID of the result in the Scopus database
2-s2.0-85122698130