Atomic force microscopy studies of cross-sections of columnar thin films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F07%3A%230000392" target="_blank" >RIV/00177016:_____/07:#0000392 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1088/0957-0233/18/2/S28" target="_blank" >http://dx.doi.org/10.1088/0957-0233/18/2/S28</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/0957-0233/18/2/S28" target="_blank" >10.1088/0957-0233/18/2/S28</a>

Result language

angličtina

Original language name

Atomic force microscopy studies of cross-sections of columnar thin films

Original language description

In this paper, the columnar structure of TiO2 and HfO2 thin films prepared on silicon wafers is studied using two modifications of atomic force microscopy (AFM), i.e., by standard AFM and micro-hardness modification of AFM. These methods are applied to the cross-sections of the films created by fracturing samples consisting of substrates covered with the films under investigation. It is shown that the edge of the film in the cross-section does not cause an obstacle for scanning the AFM images corresponding to both the AFM modifications mentioned above. In this paper it is also shown that the micro-hardness contrast mode of AFM is the more useful technique for imaging the columnar structure of films than standard AFM when film cross-sections exhibit artificial defects originated as a consequence of fracturing the films.

Czech name

—

Czech description

—

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

—

Project

<a href="/en/project/KAN311610701" target="_blank" >KAN311610701: Nanometrology using methods of scanning probe microscopy</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2007

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Measurement Science and Technology

ISSN

0957-0233

e-ISSN

—

Volume of the periodical

18

Issue of the periodical within the volume

2

Country of publishing house

GB - UNITED KINGDOM

Number of pages

4

Pages from-to

528-531

UT code for WoS article

—

EID of the result in the Scopus database

—