Bringing real-time traceability to high-speed atomic force microscopy
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F20%3AN0000035" target="_blank" >RIV/00177016:_____/20:N0000035 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26620/20:PU138469
Result on the web
<a href="https://iopscience.iop.org/article/10.1088/1361-6501/ab7ca9" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6501/ab7ca9</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6501/ab7ca9" target="_blank" >10.1088/1361-6501/ab7ca9</a>
Alternative languages
Result language
angličtina
Original language name
Bringing real-time traceability to high-speed atomic force microscopy
Original language description
In recent years, there has been growth in the development of high-speed AFMs, which offer the possibility of video rate scanning and long-range scanning over several hundred micrometres. However, until recently these instruments have been lacking full traceable metrology. In this paper traceable metrology, using optical interferometry, has been added to an open-loop contact-mode high-speed AFM to provide traceability both for short-range video rate images and large-area scans made using a combination of a high-speed dual-axis scanner and long-range positioning system. Using optical interferometry to determine stages' positions and cantilever displacement enables the direct formation of images, obviating the need for complex post-processing corrections to compensate for lateral stage error. The application of metrology increases the spatial accuracy and linearisation of the high-speed AFM measurements, enabling the generation of very large traceable composite images.
Czech name
—
Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
21100 - Other engineering and technologies
Result continuities
Project
<a href="/en/project/7AX13020" target="_blank" >7AX13020: Metrology for movement and positioning in six degrees of freedom</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Measurement Science and Technology
ISSN
0957-0233
e-ISSN
1361-6501
Volume of the periodical
31
Issue of the periodical within the volume
7
Country of publishing house
GB - UNITED KINGDOM
Number of pages
11
Pages from-to
—
UT code for WoS article
000531259600001
EID of the result in the Scopus database
2-s2.0-85085052684