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Spectroscopic ellipsometry on sinusoidal surface-relief gratings

Result description

Spectroscopic ellipsometry (SE) is used to study a sinusoidal-relief grating fabricated on a surface of transparent polymer. An optically thick polymer layer is situated on a glass substrate and its refraction index is optically matched to the index of the glass. The rigorous coupled wave analysis, implemented as the Airy-like internal reflection series, is applied to calculate the optical response of the relief grating.

Keywords

Spectroscopicellipsometrysinusoidalsurface-reliefgratings

The result's identifiers

Alternative languages

  • Result language

    angličtina

  • Original language name

    Spectroscopic ellipsometry on sinusoidal surface-relief gratings

  • Original language description

    Spectroscopic ellipsometry (SE) is used to study a sinusoidal-relief grating fabricated on a surface of transparent polymer. An optically thick polymer layer is situated on a glass substrate and its refraction index is optically matched to the index of the glass. The rigorous coupled wave analysis, implemented as the Airy-like internal reflection series, is applied to calculate the optical response of the relief grating.

  • Czech name

    Spektroskopická elipsometrie na mřížkách se sinusoidálním reliefem povrchu

  • Czech description

    Spektroskopická elipsometry (SE) je užita ke studiu mřížky se sinusoidálním reliefem povrchu vyrobené na povrchu transparentního polymeru. Opticky tlustá polymerová vrstva je umístěna na skleněné podložce a její index lomu je opticky přizpůsoben indexu lomu skla. Rigorózní analýza vázaných vln na bázi Airyho řady vnitřních odrazů je užita k výpočtu optické odezvy této mřížky.

Classification

  • Type

    Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BM - Solid-state physics and magnetism

  • OECD FORD branch

Result continuities

Others

  • Publication year

    2005

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Applied Surface Science

  • ISSN

    0169-4332

  • e-ISSN

  • Volume of the periodical

    244

  • Issue of the periodical within the volume

    1

  • Country of publishing house

    NL - THE KINGDOM OF THE NETHERLANDS

  • Number of pages

    4

  • Pages from-to

    221-224

  • UT code for WoS article

  • EID of the result in the Scopus database

Basic information

Result type

Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

Jx

CEP

BM - Solid-state physics and magnetism

Year of implementation

2005