Computational study of plasma-surface interaction in plasma-assisted technologies

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F09%3A00206605" target="_blank" >RIV/00216208:11320/09:00206605 - isvavai.cz</a>

Alternative codes found

RIV/60076658:12410/09:00010649

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Computational study of plasma-surface interaction in plasma-assisted technologies

Original language description

The influence of the unevenness of substrates immersed into plasma important for plasma-based treatment of materials was studied by computer experiment. For this analysis the combination of multidimensional fluid modelling and particle The influence of the unevenness of substrates immersed into plasma important for plasma-based treatment of materials was studied by computer experiment. For this analysis the combination of multidimensional fluid modelling and particle simulation was used. The main attention was devoted to the influence of substrate geometry in both macroscopic and microscopic spatial scales on the local electric fields in plasma.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Publication year

2009

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

European Physical Journal. D

ISSN

1434-6060

e-ISSN

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Volume of the periodical

54

Issue of the periodical within the volume

2

Country of publishing house

DE - GERMANY

Number of pages

7

Pages from-to

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UT code for WoS article

000268329200040

EID of the result in the Scopus database

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