Computational simulation of metal ion propagation from plasma to substrates with uneven surfaces

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10191391" target="_blank" >RIV/00216208:11320/13:10191391 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.vacuum.2012.09.005" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2012.09.005</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2012.09.005" target="_blank" >10.1016/j.vacuum.2012.09.005</a>

Result language
angličtina
Original language name
Computational simulation of metal ion propagation from plasma to substrates with uneven surfaces
Original language description
The influence of the unevenness of substrates immersed into plasma on plasma surface interactions was studied by the combination of multidimensional fluid modelling and particle simulation connected together in iterative hybrid code. The fluid part of our model consisted of continuity equations for all charged species and Poisson's equation. The non self-consistent particle simulation technique was used both for the calculation of local electron energy distribution function and for the derivation of quantities characterising plasma surface interaction. This approach enabled us to study in detail the structure of the plasma near metal substrates with complex geometries, i.e. planar substrates covered by a variety of hemispherical protrusions. The main attention was devoted to the influence of substrate unevenness in both macroscopic and microscopic spatial scales on both metal ions and ions of background gas propagation to the substrate.
Czech name
—
Czech description
—

Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
—

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)