Spatial Distribution of Plasma Parameters in DC-energized Hollow Cathode Plasma Jet: System Stability
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F09%3A00207251" target="_blank" >RIV/00216208:11320/09:00207251 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Spatial Distribution of Plasma Parameters in DC-energized Hollow Cathode Plasma Jet: System Stability
Original language description
DC energized hollow cathode plasma jet system was examined by moveable Langmuir probe. Spatial distribution of electron concentration, plasma and floating potentials and mean electron energy were obtained from measured probe characteristics. The radial dependence of plasma parameters was measured for distances from the system axis 0-120 mm. Temporal dependences of main plasma parameters for discharges in clean argon and argon-oxygen mixture were obtained from probe voltage current characteristics. The system with Ti nozzle permits deposition of pure Ti as well as its compounds with active working gas admixtures such as O2, N2, etc. TiOx thin films were deposited onto glass substrates and examined by AFM and elipsometry.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
WDS´09 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
ISBN
978-80-7378-102-6
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
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Publisher name
Matfyzpress
Place of publication
Prague
Event location
Prague
Event date
Jan 1, 2009
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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