Langmuir Probe Diagnostics of DC Cylindrical Magnetron
Result description
Spatial variations of plasma parameters have been studied in the cylindrical magnetron device using the radially movable Langmuir probe. Measurements were performed in the neon weakly magnetized plasma. The probe system was controlled by the Agilent VEEsoftware. From probe characteristics, radial dependences of plasma parameters (plasma potential, floating potential, electron density) were obtained. This study is concentrated to new results obtained from spherical probe and comparison with cylindricalprobe.
Keywords
The result's identifiers
Result code in IS VaVaI
Result on the web
http://www.mff.cuni.cz/veda/konference/wds/proc/pdf13/WDS13_220_f2_Kolpakova.pdf
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Langmuir Probe Diagnostics of DC Cylindrical Magnetron
Original language description
Spatial variations of plasma parameters have been studied in the cylindrical magnetron device using the radially movable Langmuir probe. Measurements were performed in the neon weakly magnetized plasma. The probe system was controlled by the Agilent VEEsoftware. From probe characteristics, radial dependences of plasma parameters (plasma potential, floating potential, electron density) were obtained. This study is concentrated to new results obtained from spherical probe and comparison with cylindricalprobe.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
WDS'13 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
ISBN
978-80-7378-251-1
ISSN
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e-ISSN
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Number of pages
7
Pages from-to
127-133
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha
Event date
Jun 4, 2013
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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Basic information
Result type
D - Article in proceedings
CEP
BL - Plasma physics and discharge through gases
Year of implementation
2013