Study of DC Cylindrical Magnetron by Langmuir Probe

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F12%3A10133151" target="_blank" >RIV/00216208:11320/12:10133151 - isvavai.cz</a>
Result on the web
<a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf12/WDS12_213_f2_Kolpakova.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf12/WDS12_213_f2_Kolpakova.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Study of DC Cylindrical Magnetron by Langmuir Probe
Original language description
We present results of the Langmuir probe measurements in the cylindrical magnetron apparatus in this paper. Measurements were performed in low-temperature and low-pressure neon plasma. This work aims to study the impact of different values of macroparameters (e.g. discharge current, the strength of the magnetic field, pressure) on plasma microparameters (floating potential, plasma potential, electron density). The radial profiles of plasma parameters were obtained from Langmuir probe characteristics. New results of neon plasma are mutually complementary and well comparable with previous measurements in argon.
Czech name
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Czech description
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Project
<a href="/en/project/GAP205%2F11%2F0386" target="_blank" >GAP205/11/0386: Advanced experimental research of discharge plasma sources applied for deposition of nanostructured thin films</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'12 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
ISBN
978-80-7378-225-2
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
76-80
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha
Event date
May 29, 2012
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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