Size-controlled formation of Cu nanoclusters in pulsed magnetron sputtering system

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F11%3A10107125" target="_blank" >RIV/00216208:11320/11:10107125 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/11:00367262
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2010.10.030" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2010.10.030</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2010.10.030" target="_blank" >10.1016/j.surfcoat.2010.10.030</a>

Result language
angličtina
Original language name
Size-controlled formation of Cu nanoclusters in pulsed magnetron sputtering system
Original language description
Size-controlled Cu clusters are formed in a system which combines pulsed magnetron sputtering and gas condensation at room temperature. The discharge repetition frequency (0.1-25 kHz) and the duty cycles (20-90%) of the magnetron sputtering are varied systematically, the influence of discharge current (100-800 mA) and the pressure in the condensation tube (25-90 Pa) is also investigated. The cluster mass is determined by a quadrupole mass filter in the aggregation tube, and the cluster size by atomic force microscopy (AFM) imaging of deposited clusters. For all preparation conditions, the cluster mass shows a log-normal distribution. A non-monotonic frequency dependence with a maximum at 1 kHz and 20% of duty cycle is observed (about 10^(5) amu, or cluster diameter 8-10 nm). By adjusting discharge frequency and duty cycle, the cluster mass can be decreased by one order of magnitude. We suggest that this effect is caused by energy dissipated into the aggregation tube; and find a critica
Czech name
—
Czech description
—

Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
—

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)