Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F10%3A00351378" target="_blank" >RIV/68378271:_____/10:00351378 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina

Original language description

The paper is devoted to the investigation of ion composition of plasma of dc pulsed magnetron discharge generated by a magnetron with Al target in an Ar/O2 mixture. The magnetron discharge was investigated in the non-reactive, metallic and oxide mode ofsputtering using a mass spectrometer. The amount and energies of neutral oxygen atoms O,positive O+ and O2+ ions, and negative O- and O2- ions were measured as a function of oxygen flow rate ?O2, magnetron voltage Ud and constant power Pd=400W deliveredto the magnetron discharge, repetition frequency of pulses f=10 kHz and the ratio of O2 and Ar flow rates ?O2=?Ar. The content of ions and radicals in magnetron discharge is compared with optical spectroscopy measurements. The obtained results give a deeper insight into reactive magnetron sputtering of oxide films.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2010

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Plasma Processes and Polymers

ISSN

1612-8850

e-ISSN

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Volume of the periodical

7

Issue of the periodical within the volume

11

Country of publishing house

DE - GERMANY

Number of pages

5

Pages from-to

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UT code for WoS article

000285212000004

EID of the result in the Scopus database

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