Diagnostics of Reactive HiPIMS Discharge Assisted by ECWR Plasma

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F21%3A10440104" target="_blank" >RIV/00216208:11320/21:10440104 - isvavai.cz</a>
Result on the web
<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf21/WDS21_17_f2_Kapran.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf21/WDS21_17_f2_Kapran.pdf</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Diagnostics of Reactive HiPIMS Discharge Assisted by ECWR Plasma
Original language description
This study is focused on the investigation of plasma parameters in reactive HiPIMS with iron target in Ar+O2 gas mixture for two different configurations - conventional HiPIMS and hybrid system HiPIMS assisted with the electron cyclotron wave resonance (ECWR) discharge. In reactive HiPIMS+ECWR configuration a discharge could be maintained at working gas pressure lower than typical for conventional reactive HiPIMS. Due to reduced pressure the plasma parameters such as electron temperature and ion flux density differ from common HiPIMS. The measurements were performed using an iron target in Ar/O2 atmosphere. Plasma parameters have been studied as a function of varying oxygen flow rate during magnetron sputtering process. The diagnostics of plasma was performed by means of RF planar ion flux probe at the position of the substrate.
Czech name
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Czech description
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Project
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Continuities
S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
WDS'21 Proceedings of Contributed Papers — Physics
ISBN
978-80-7378-455-3
ISSN
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e-ISSN
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Number of pages
7
Pages from-to
120-126
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha/ZOOM
Event date
Jun 15, 2021
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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