Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F11%3A10109807" target="_blank" >RIV/00216208:11320/11:10109807 - isvavai.cz</a>
Result on the web
<a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_221_f2_Kluson.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_221_f2_Kluson.pdf</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System
Original language description
We present results from two mutualy independent measurements of flow velocity from the plasma jet nozzle outlet. Operation of the discharge in the pulse regime enables a simple use of the classical Langmuir probe for the flow velocity measurement. Previous probe measurements showed that in the space below the nozzle there is almost no electric field which could accelerate the ions and so we can assume that the propagation of positive ions towards the negatively biased probe is driven just by mutual collisions and the diffusion process. As the second method the well known Pitot tube was used. By this method we have experimentally proved that the flow velocity is almost not at all affected by the presence of plasma, i.e. it does not depend on the fact whether the discharge is on or off. Results of both metods are in a good correspondence. It was documented that the discharge can be operated both as subsonic and as supersonic one. The appropriate dependences of the flow velocity on the di
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GD202%2F08%2FH057" target="_blank" >GD202/08/H057: Modern trends in plasma physics</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
WDS'11 Proceedings of Contributed Papers: Part II ? Physics of Plasmas and Ionized Media
ISBN
978-80-7378-185-9
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
125-130
Publisher name
Matfyzpress
Place of publication
Praha
Event location
Praha
Event date
May 31, 2011
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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