Measurement of the plasma and neutral gas flow velocities in a low-pressure hollow-cathode plasma jet sputtering system

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10191416" target="_blank" >RIV/00216208:11320/13:10191416 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1088/0963-0252/22/1/015020" target="_blank" >http://dx.doi.org/10.1088/0963-0252/22/1/015020</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/0963-0252/22/1/015020" target="_blank" >10.1088/0963-0252/22/1/015020</a>

Result language

angličtina

Original language name

Measurement of the plasma and neutral gas flow velocities in a low-pressure hollow-cathode plasma jet sputtering system

Original language description

We present results from two mutually independent measurements of plasma and neutral gas flow velocities in a plasma jet deposition system. Operation of a hollow-cathode discharge within the plasma jet nozzle in the pulse regime enables the simple use ofa classical Langmuir probe for the plasma flow velocity measurement. In this method, we assume that the plasma is generated solely inside the nozzle during the power impulse and we measure the time of flight of the ions along a known distance between thenozzle end and the probe. The plasma velocity at the plasma jet axis is then determined by differentiation of the dependence of the distance covered by ions on time. As the second method the well-known Pitot tube is used for measurement of the neutral gas velocity. By comparison of both methods we have experimentally proved that the neutral gas flow velocity is almost unaffected by the presence of the plasma, i.e. it does not substantially depend on whether the discharge is switched on

Czech name

—

Czech description

—

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

—

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Plasma Sources Science and Technology

ISSN

0963-0252

e-ISSN

—

Volume of the periodical

22

Issue of the periodical within the volume

1

Country of publishing house

GB - UNITED KINGDOM

Number of pages

7

Pages from-to

—

UT code for WoS article

000314966300025

EID of the result in the Scopus database

—