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Experimental Study of the Discharge in the Low Pressure Plasma Jet Sputtering System

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10191399" target="_blank" >RIV/00216208:11320/13:10191399 - isvavai.cz</a>

  • Alternative codes found

    RIV/68378271:_____/13:00437315

  • Result on the web

    <a href="http://dx.doi.org/10.1002/ctpp.201310002" target="_blank" >http://dx.doi.org/10.1002/ctpp.201310002</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1002/ctpp.201310002" target="_blank" >10.1002/ctpp.201310002</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Experimental Study of the Discharge in the Low Pressure Plasma Jet Sputtering System

  • Original language description

    This article reports on experimental study of the discharge in the low pressure plasma jet sputtering system operated in the continuous DC regime of the discharge excitation. Presented measurements were focused on the description of the working pressureimpact on the basic discharge characteristics. The pressure dependence of the gas flow velocity from the nozzle was examined by means of Pitot tube. Further an approximate measurement of the discharge current spatial distribution was realized as well. The second half of the article presents results from Langmuir probe measurements under the conditions of low pressures in the range of units of pascals. These conditions are of special importance in some particular applications especially in preparation ofthin layers with high crystallinity. Used experimental setup enabled to perform Langmuir probe diagnostic with spatial resolution both in the plasma jet axis direction and in the direction perpendicular to it.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2013

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Contributions to Plasma Physics

  • ISSN

    0863-1042

  • e-ISSN

  • Volume of the periodical

    53

  • Issue of the periodical within the volume

    1

  • Country of publishing house

    DE - GERMANY

  • Number of pages

    6

  • Pages from-to

    10-15

  • UT code for WoS article

    000313491700005

  • EID of the result in the Scopus database