Experimental Study of the Discharge in the Low Pressure Plasma Jet Sputtering System
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10191399" target="_blank" >RIV/00216208:11320/13:10191399 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/13:00437315
Result on the web
<a href="http://dx.doi.org/10.1002/ctpp.201310002" target="_blank" >http://dx.doi.org/10.1002/ctpp.201310002</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/ctpp.201310002" target="_blank" >10.1002/ctpp.201310002</a>
Alternative languages
Result language
angličtina
Original language name
Experimental Study of the Discharge in the Low Pressure Plasma Jet Sputtering System
Original language description
This article reports on experimental study of the discharge in the low pressure plasma jet sputtering system operated in the continuous DC regime of the discharge excitation. Presented measurements were focused on the description of the working pressureimpact on the basic discharge characteristics. The pressure dependence of the gas flow velocity from the nozzle was examined by means of Pitot tube. Further an approximate measurement of the discharge current spatial distribution was realized as well. The second half of the article presents results from Langmuir probe measurements under the conditions of low pressures in the range of units of pascals. These conditions are of special importance in some particular applications especially in preparation ofthin layers with high crystallinity. Used experimental setup enabled to perform Langmuir probe diagnostic with spatial resolution both in the plasma jet axis direction and in the direction perpendicular to it.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Contributions to Plasma Physics
ISSN
0863-1042
e-ISSN
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Volume of the periodical
53
Issue of the periodical within the volume
1
Country of publishing house
DE - GERMANY
Number of pages
6
Pages from-to
10-15
UT code for WoS article
000313491700005
EID of the result in the Scopus database
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