X-ray diffraction investigations of TiO 2 thin films and their thermal stability
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F12%3A10129466" target="_blank" >RIV/00216208:11320/12:10129466 - isvavai.cz</a>
Result on the web
<a href="http://journals.cambridge.org/action/displayAbstract?fromPage=online&aid=8331579" target="_blank" >http://journals.cambridge.org/action/displayAbstract?fromPage=online&aid=8331579</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1557/opl.2011.1133" target="_blank" >10.1557/opl.2011.1133</a>
Alternative languages
Result language
angličtina
Original language name
X-ray diffraction investigations of TiO 2 thin films and their thermal stability
Original language description
In-situ laboratory measurements in X-ray diffraction (XRD) high-temperature chamber and detailed XRD measurements at room temperature were used for the study of the thickness, temperature and time dependences of crystallization of amorphous TiO 2 thin films. The films deposited by magnetron sputtering, plasma jet sputtering and sol-gel method were analyzed. Tensile stresses were detected in the first two cases. They are generated during the crystallization and inhibit further crystallization that also depends on the film thickness. XRD indicated quite rapid growth of larger crystallites unlike the sol-gel films when the crystallites grow mainly by increasing of annealing temperature.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Materials Research Society Symposium Proceedings
ISSN
0272-9172
e-ISSN
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Volume of the periodical
1352
Issue of the periodical within the volume
Listopad
Country of publishing house
US - UNITED STATES
Number of pages
6
Pages from-to
57-62
UT code for WoS article
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EID of the result in the Scopus database
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