Advances in Optical and Magnetooptical Scatterometry of Periodically Ordered Nanostructured Arrays
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10190413" target="_blank" >RIV/00216208:11320/13:10190413 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1155/2013/621531" target="_blank" >http://dx.doi.org/10.1155/2013/621531</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1155/2013/621531" target="_blank" >10.1155/2013/621531</a>
Alternative languages
Result language
angličtina
Original language name
Advances in Optical and Magnetooptical Scatterometry of Periodically Ordered Nanostructured Arrays
Original language description
We review recent advances in optical and magnetooptical (MO) scatterometry applied to periodically ordered nanostructures such as periodically patterned lines, wires, dots, or holes.. e techniques are based on spectroscopic ellipsometry (SE), either in the basic or generalized modes, Mueller matrix polarimetry, and MO spectroscopy mainly based on MO Kerr effect measurements. We briefly present experimental setups, commonly used theoretical approaches, and experimental results obtained by SE and MO spectroscopic analyses of various samples. The reviewed analyses are mainly related to monitoring optical critical dimensions such as the widths, depths, and periods of the patterned elements, their real shapes, and their line edge or linewidth roughness. Wealso discuss the advantages and disadvantages of the optical spectroscopic techniques compared to direct monitoring techniques.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GPP204%2F10%2FP346" target="_blank" >GPP204/10/P346: Spectroscopy of magnetic nanostructures</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Nanomaterials
ISSN
1687-4110
e-ISSN
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Volume of the periodical
2013
Issue of the periodical within the volume
2013
Country of publishing house
US - UNITED STATES
Number of pages
10
Pages from-to
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UT code for WoS article
000314423400001
EID of the result in the Scopus database
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