Role of oxygen admixture in stabilizing TiO (x) nanoparticle deposition from a gas aggregation source

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10191040" target="_blank" >RIV/00216208:11320/13:10191040 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1007/s11051-013-2125-0" target="_blank" >http://dx.doi.org/10.1007/s11051-013-2125-0</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/s11051-013-2125-0" target="_blank" >10.1007/s11051-013-2125-0</a>

Result language

angličtina

Original language name

Role of oxygen admixture in stabilizing TiO (x) nanoparticle deposition from a gas aggregation source

Original language description

For the use of a gas aggregation cluster source a high and stable deposition rate is desired. For many metals, nanoparticle formation is enhanced by admixture of reactive gases. Here, the role of reactive gas admixtures on the nanoparticle deposition rates is investigated for the case of reactive direct current magnetron sputtering of Ti in a gas aggregation chamber. The results show that, at low working gas (argon) pressures, stable cluster deposition at high rates can only be achieved for admixtures with a very narrow oxygen flow range. At higher pressures, stable deposition can be observed only after an intermediate maximum rate has been crossed or a stable deposition rate is not reached at all. For the different sputtering conditions, the partial pressure of oxygen was monitored with a mass spectrometer. The results are explained in terms of the competing roles of oxygen in cluster nucleation as well as in target poisoning. The cluster size distributions for different conditions we

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

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Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of Nanoparticle Research

ISSN

1388-0764

e-ISSN

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Volume of the periodical

15

Issue of the periodical within the volume

12

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

11

Pages from-to

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UT code for WoS article

000327525400001

EID of the result in the Scopus database

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