Preparation of metal oxide nanoparticles by gas aggregation cluster source
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F15%3A10313689" target="_blank" >RIV/00216208:11320/15:10313689 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.vacuum.2015.07.008" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2015.07.008</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2015.07.008" target="_blank" >10.1016/j.vacuum.2015.07.008</a>
Alternative languages
Result language
angličtina
Original language name
Preparation of metal oxide nanoparticles by gas aggregation cluster source
Original language description
Al/AlxOy and Ti/TiOx nanoparticles have been fabricated using gas aggregation cluster source (GAS) equipped with 3-inch planar magnetrons. The main attention has been devoted to the evaluation of the role of oxygen admixture on the deposition rate and properties of formed nanoparticles. It has been found that oxidized nanoparticles are deposited when oxygen is present in the working gas mixture. Highest deposition rates for production of Al/AlxOy or Ti/TiOx nanoparticles were observed when 3% or 1.5% oxygen was present in the working gas mixture, respectively. Mean diameters of about 16 nm for the AlxOy nanoparticles and 30 nm for TiOx have been found under these deposition conditions.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA13-09853S" target="_blank" >GA13-09853S: Application of low temperature plasma in a gas aggregation cluster source for deposition of nanoparticles, nanostructured and nanocomposite films</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Vacuum
ISSN
0042-207X
e-ISSN
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Volume of the periodical
120
Issue of the periodical within the volume
Neuveden
Country of publishing house
GB - UNITED KINGDOM
Number of pages
8
Pages from-to
162-169
UT code for WoS article
000361405000028
EID of the result in the Scopus database
2-s2.0-84937792184