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Preparation of metal oxide nanoparticles by gas aggregation cluster source

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F15%3A10313689" target="_blank" >RIV/00216208:11320/15:10313689 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1016/j.vacuum.2015.07.008" target="_blank" >http://dx.doi.org/10.1016/j.vacuum.2015.07.008</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.vacuum.2015.07.008" target="_blank" >10.1016/j.vacuum.2015.07.008</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Preparation of metal oxide nanoparticles by gas aggregation cluster source

  • Original language description

    Al/AlxOy and Ti/TiOx nanoparticles have been fabricated using gas aggregation cluster source (GAS) equipped with 3-inch planar magnetrons. The main attention has been devoted to the evaluation of the role of oxygen admixture on the deposition rate and properties of formed nanoparticles. It has been found that oxidized nanoparticles are deposited when oxygen is present in the working gas mixture. Highest deposition rates for production of Al/AlxOy or Ti/TiOx nanoparticles were observed when 3% or 1.5% oxygen was present in the working gas mixture, respectively. Mean diameters of about 16 nm for the AlxOy nanoparticles and 30 nm for TiOx have been found under these deposition conditions.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BM - Solid-state physics and magnetism

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/GA13-09853S" target="_blank" >GA13-09853S: Application of low temperature plasma in a gas aggregation cluster source for deposition of nanoparticles, nanostructured and nanocomposite films</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2015

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Vacuum

  • ISSN

    0042-207X

  • e-ISSN

  • Volume of the periodical

    120

  • Issue of the periodical within the volume

    Neuveden

  • Country of publishing house

    GB - UNITED KINGDOM

  • Number of pages

    8

  • Pages from-to

    162-169

  • UT code for WoS article

    000361405000028

  • EID of the result in the Scopus database

    2-s2.0-84937792184