Deposition of rutile (TiO2) with preferred orientation by assisted high power impulse magnetron sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10191439" target="_blank" >RIV/00216208:11320/13:10191439 - isvavai.cz</a>

Alternative codes found

RIV/68378271:_____/13:00393045

Result on the web

<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.02.012" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2013.02.012</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.02.012" target="_blank" >10.1016/j.surfcoat.2013.02.012</a>

Result language

angličtina

Original language name

Deposition of rutile (TiO2) with preferred orientation by assisted high power impulse magnetron sputtering

Original language description

The effect of energetic ion bombardment on TiO2 crystallographic phase formation was studied. Films were deposited using high-power impulse magnetron sputtering (HiPIMS) assisted by an electron cyclotron wave resonance (ECWR) plasma. The ECWR assistanceallows a significant reduction of pressure down to 0.075 Pa during reactive HiPIMS deposition and subsequently enables control of the energy of the deposited species over a wide range. Films deposited at high ion energies and deposition rates form rutilewith (101) a preferred orientation. With decreasing ion energy and deposition rates, rutile is formed with random crystallite orientation, and finally at low ion energies the anatase phase occurs. It is supposed that particles gain high energy during the HiPIMS pulse while the ECWR discharge is mostly responsible for substrate heating due to dissipated power. However, the energetic contribution of the ECWR discharge is not sufficient for annealing and phase transformation.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

222

Issue of the periodical within the volume

květen

Country of publishing house

CH - SWITZERLAND

Number of pages

6

Pages from-to

112-117

UT code for WoS article

000318135100016

EID of the result in the Scopus database

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