All

What are you looking for?

All
Projects
Results
Organizations

Quick search

  • Projects supported by TA ČR
  • Excellent projects
  • Projects with the highest public support
  • Current projects

Smart search

  • That is how I find a specific +word
  • That is how I leave the -word out of the results
  • “That is how I can find the whole phrase”

Highly ionized physical vapor deposition plasma source working at very low pressure

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00377251" target="_blank" >RIV/68378271:_____/12:00377251 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216208:11320/12:10130624

  • Result on the web

    <a href="http://dx.doi.org/10.1063/1.3699229" target="_blank" >http://dx.doi.org/10.1063/1.3699229</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1063/1.3699229" target="_blank" >10.1063/1.3699229</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Highly ionized physical vapor deposition plasma source working at very low pressure

  • Original language description

    Highly ionized discharge for physical vapor deposition at very low pressure is presented in the paper. The discharge is generated by electron cyclotron wave resonance (ECWR) which assists with ignition of high power impulse magnetron sputtering (HiPIMS)discharge. The magnetron gun (with Ti target) was built into the single-turn coil RF electrode of the ECWR facility. ECWR assistance provides pre-ionization effect which allows significant reduction of pressure during HiPIMS operation down to p=0.05 Pa;this is nearly more than an order of magnitude lower than at typical pressure ranges of HiPIMS discharges. We can confirm that nearly all sputtered particles are ionized (only Ti+ and Ti++ peaks are observed in the mass scan spectra). This corresponds well with high plasma density ne 1018m 3, measured during the HiPIMS pulse.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2012

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Applied Physics Letters

  • ISSN

    0003-6951

  • e-ISSN

  • Volume of the periodical

    100

  • Issue of the periodical within the volume

    14

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    3

  • Pages from-to

    "141604-1"-"141604-3"

  • UT code for WoS article

    000302567800013

  • EID of the result in the Scopus database